Intellectual Property India Publishes Patent Application for 'Wafer Boat Assembly And Semiconductor Process Device' Filed by Beijing Naura Microelectronics Equipment Co. Ltd.

MUMBAI, India, Oct. 11 -- Intellectual Property India has published a patent application (202517090981 A) filed by Beijing Naura Microelectronics Equipment Co. Ltd., Beijing, on Sept. 23, for 'wafer boat assembly and semiconductor process device.'

Inventor(s) include Zhou, Zhenxi; Yan, Zhishun; Hou, Pengfei; Zhao, Fuping; and Yang, Laibao.

The application for the patent was published on Oct. 10, under issue no. 41/2025.

According to the abstract released by the Intellectual Property India: "Provided in the present disclosure are a wafer boat assembly and a semiconductor process device. The wafer boat assembly comprises a plurality of wafer boats, which are configured to sequentially electrically connect to each other in a process chamber...