Intellectual Property India Publishes Patent Application for 'Polishing Carrier Head With Multiple Angular Pressurizable Zones' Filed by Applied Materials, Inc.

MUMBAI, India, Sept. 5 -- Intellectual Property India has published a patent application (202348041424 A) filed by Applied Materials, Inc., Santa Clara, U.S.A., on June 19, 2023, for 'polishing carrier head with multiple angular pressurizable zones.'

Inventor(s) include Zuniga, Steven M.; Gurusamy, Jay; Nagengast, Andrew J.; and Galburt, Vladimir.

The application for the patent was published on Sept. 5, under issue no. 36/2025.

According to the abstract released by the Intellectual Property India: "A carrier head (140) for holding (10) a substrate in a polishing system, comprising: a housing (144); and a flexible membrane (182) extending below the housing, the flexible membrane dividing a volume above the flexible membrane into a multipl...