MUMBAI, India, Jan. 31 -- Intellectual Property India has published a patent application (202417069948 A) filed by Ichor Systems, Inc., Fremont, U.S.A., on Sept. 16, 2024, for 'fluid delivery module.'
Inventor(s) include Carson, Stephen.
The application for the patent was published on Jan. 31, under issue no. 05/2025.
According to the abstract released by the Intellectual Property India: "Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for measuring various properties of process fluids. Fluid flow components for measuring may be constr...