India, April 27 -- What Is X-Ray Lithography?

X-ray lithography is a high-resolution patterning technique to fabricate micro and nanoelectronic devices. It employs X-ray radiation with wavelengths between 0.4 and 4 nanometres to transfer geometric patterns from a mask onto a light-sensitive resist layer deposited on a substrate, typically silicon.

How Does X-Ray Lithography Work?

X-ray lithography works similarly to photolithography but with X-rays. The following is a step-by-step breakdown:

Substrate Preparation: A thin layer of resist is deposited on the substrate, typically a silicon wafer.

Mask Making: An X-ray mask containing the desired circuit pattern is created. This mask is similar to a photographic negative, with the desire...