US Patent Issued to Tokyo Electron on June 17 for "Boat transfer method and heat treatment apparatus" (Japanese, German, South Korean Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,380, issued on June 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"Boat transfer method and heat treatment apparatus" was invented by Shingo Hishiya (Yamanashi, Japan), Hiroaki Ikegawa (Yamanashi, Japan), Volker Hemel (Dresden, Germany), Bernhard Zobel (Dresden, Germany) and Sung Duk Son (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "With respect to a boat transfer method for transferring a boat holding a substrate into a processing chamber, the boat transfer method includes supplying a reducing gas into the processing chamber, and transferring the boat into the processing chamber in a state in which the reducing gas is ...