ALEXANDRIA, Va., June 17 -- United States Patent no. 12,313,652, issued on May 27, was assigned to The University Court of the University of Glasgow (Glasgow, Great Britain).

"Micromachined mechanical part and methods of fabrication thereof" was invented by Thomas McMullen (Glasgow, Great Britain) and Richard Bates (Glasgow, Great Britain).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates primarily to a method of fabrication of one or more free-standing micromachined parts. The method includes performing reactive ion etching of photoresist and tungsten-based layers supported on a carrier substrate to thereby define one or more micromachined parts, followed by separating the resultin...