US Patent Issued to The Board of Trustees of the Leland Stanford Junior University on Sept. 2 for "Matrix-based characterization and measurements for semiconductor thin-film material" (California Inventors)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,405,223, issued on Sept. 2, was assigned to The Board of Trustees of the Leland Stanford Junior University (Stanford, Calif.).

"Matrix-based characterization and measurements for semiconductor thin-film material" was invented by Thaibao Phan (Redwood City, Calif.), Evan W. Wang (Stanford, Calif.) and Jonathan A. Fan (Los Altos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Certain examples are directed to methods for detection of anomalies in semiconductor thin-film materials, such as strains, defects and the like, that may precipitate defects in semiconductor processing steps and may adversely impact device and system-level functionality, proce...