US Patent Issued to SPSGLOBAL on June 17 for "Remote monitoring apparatus for air valve for semiconductor equipment" (South Korean Inventor)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,371, issued on June 17, was assigned to SPSGLOBAL Co. Ltd (Cheonan-si, South Korea).

"Remote monitoring apparatus for air valve for semiconductor equipment" was invented by Sang Hyub Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a remote monitoring apparatus for an air valve for semiconductor equipment. The remote monitoring apparatus includes: a communication network formed by selecting one or more from the Internet, a Bluetooth network, a Wi-Fi network, and an Internet of Things (IoT) network and then combining them, and configured to connect a device, a server, and a terminal; an inspection device...