ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,977, issued on Oct. 14, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus" was invented by Chan Young Choi (Suwon-si, South Korea), Ki Won Han (Anseong-si, South Korea), Wan Hee Jeong (Hwaseong-si, South Korea), Kyo Bong Kim (Seongnam-si, South Korea), Hee Chan Kim (Hwaseong-si, South Korea), Doo Hyun Baek (Hwaseong-si, South Korea), Sang-Oh Kim (Seoul, South Korea) and Hee Jae Byun (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the inventive concept pr...