US Patent Issued to LG Display on March 25 for "Apparatus and method of manufacturing oxide film and display apparatus including the oxide film" (South Korean Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,258,663, issued on March 25, was assigned to LG Display Co. Ltd. (Seoul, South Korea).

"Apparatus and method of manufacturing oxide film and display apparatus including the oxide film" was invented by Jaeyoon Park (Paju-si, South Korea), JaeHyeon Park (Paju-si, South Korea), KiHoon Park (Paju-si, South Korea) and PilSang Yun (Paju-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are an apparatus and method of manufacturing an oxide film having a uniform composition and thickness. The apparatus includes a lower chamber including a reaction space, a susceptor to support a substrate, a chamber lid including gas injection ports, a g...