ALEXANDRIA, Va., June 19 -- United States Patent no. 12,331,402, issued on June 17, was assigned to Lam Research Corp. (Fremont, Calif.).

"Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition" was invented by Rachel E. Batzer (Tigard, Ore.), Huatan Qiu (Portland, Ore.), Bhadri N. Varadarajan (Beaverton, Ore.), Patrick Girard Breiling (Tigard, Ore.), Bo Gong (Sherwood, Ore.), Will Schlosser (Tigard, Ore.), Zhe Gui (Beaverton, Ore.), Taide Tan (West Linn, Ore.) and Geoffrey Hohn (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system includes a first chamber including a substrate ...