US Patent Issued to L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude on Nov. 18 for "Supply system for low volatility precursors" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,473,640, issued on Nov. 18, was assigned to L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude (Paris).

"Supply system for low volatility precursors" was invented by Toshiyuki Nakagawa (Kobe, Japan), Shingo Okubo (Tsukuba, Japan), Kazuma Suzuki (Tsukuba, Japan), Ikuo Suzuki (Tsukuba, Japan), Koji Ishida (Tsukuba, Japan), Takashi Kameoka (Tsukuba, Japan), Kazutaka Yanagita (Tsukuba, Japan), Mikio Goto (Minato, Japan), Koji Matsumoto (Nagano, Japan), Fumikazu Nozawa (Sakura, Japan), Terumasa Koura (Tsukuba, Japan) and Kohei Tarutani (Tsukuba, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Supply system include a...