ALEXANDRIA, Va., June 16 -- United States Patent no. 12,309,916, issued on May 20, was assigned to KOH YOUNG TECHNOLOGY INC. (Seoul, South Korea).
"Method of verifying fault of inspection unit, inspection apparatus and inspection system" was invented by Kwan Seong Kim (Suwon-si, South Korea), Myung Ho Kim (Cheonan-si, South Korea), Nam Kyu Park (Namyangju-si, South Korea) and Joo Hyuk Kim (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of verifying a fault of an inspection unit, an inspection apparatus, and an inspection system are disclosed. The method according to the present disclosure includes: providing a verification reference body which is formed on a frame attached to an i...