US Patent Issued to KLA, Carl Zeiss SMT on Dec. 30 for "Protection of optical materials of optical components from radiation degradation" (German, American Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,692, issued on Dec. 30, was assigned to KLA Corp. (Milpitas, Calif.) and Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Protection of optical materials of optical components from radiation degradation" was invented by Evgeniia Butaeva (San Jose, Calif.), Gildardo Delgado (Livermore, Calif.), Grace Chen (Los Gatos, Calif.), John Savee (San Francisco), Matthew Derstine (Los Gatos, Calif.), Vera (Guorong) Zhuang (San Jose, Calif.), Gary V. Lopez Lopez (Sunnyvale, Calif.), Felix Lange (Oberkochen, Germany) and Larissa Walter (Oberkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical system includes a bulk material including a fluorine (...