ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,457,762, issued on Oct. 28, was assigned to International Business Machines Corp. (Armonk, N.Y.).
"Cross bar vertical FETs" was invented by Brent A. Anderson (Jericho, Vt.), Junli Wang (Slingerlands, N.Y.), Indira Seshadri (Niskayuna, N.Y.), Ruilong Xie (Niskayuna, N.Y.) and Dechao Guo (Niskayuna, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The embodiments herein describe a crossbar VFET where the crossbar channel (or fin) that extends between a pair of channels (fins) has reduced corner rounding, or no corner rounding. This can be achieved by developing a masking feature before etching the channels in the VFET that results in reduced, or no cor...