ALEXANDRIA, Va., July 9 -- United States Patent no. 12,352,687, issued on July 8, was assigned to Government of the United States of America, as represented by the Secretary of Commerce (Gaithersburg, Md.).
"Mueller matrix ellipsometer" was invented by Thomas Avery Germer (Montgomery Village, Md.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present invention relate to an ellipsometer that includes a combination of a plurality of reflective devices to measure a Mueller matrix reflectance of a material in the VUV and EUV region. Ellipsometer in accordance with embodiments of the present invention relate to an ellipsometer that includes a multi-mirror polarization state generator combined w...