US Patent Issued to Gigaphoton on Dec. 30 for "Extreme ultraviolet light generation apparatus and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,641, issued on Dec. 30, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Extreme ultraviolet light generation apparatus and electronic device manufacturing method" was invented by Takashi Suganuma (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet light generation apparatus includes a first light source outputting first excitation light, a laser oscillator including an active medium and performing laser oscillation by irradiating the active medium with the first excitation light to output the laser light, a measurement instrument measuring a pulse energy and a pulse time width of the laser light, a temperature regu...