US Patent Issued to Gigaphoton, Inter-University Research Institute, National Institutes of Natural Sciences on Jan. 20 for "Ultraviolet laser apparatus and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,531,387, issued on Jan. 20, was assigned to Gigaphoton Inc. (Tochigi, Japan) and Inter-University Research Institute Corporation, National Institutes of Natural Sciences (Tokyo).

"Ultraviolet laser apparatus and electronic device manufacturing method" was invented by Yuki Tamaru (Oyama, Japan), Taisuke Miura (Oyama, Japan) and Ryo Yasuhara (Toki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ultraviolet laser apparatus includes an oscillation-stage laser, an amplifier that amplifies the pulse laser light, and an optical isolator. The optical isolator includes a first Faraday rotator that rotates the polarization direction of the pulse laser li...