US Patent Issued to EBARA on Nov. 18 for "Method of checking leakage of fluid and polishing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,472,601, issued on Nov. 18, was assigned to EBARA Corp. (Tokyo).

"Method of checking leakage of fluid and polishing apparatus" was invented by Toru Maruyama (Tokyo), Yasuyuki Motoshima (Tokyo), Shuji Uozumi (Tokyo), Keisuke Kamiki (Tokyo) and Mitsunori Komatsu (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of checking a leakage of fluid from a fluid line includes connecting a leakage checking line to the fluid line between a supply valve and a return valve, regulating a pressure regulator disposed in the leakage checking line such that a pressure of fluid of the leakage checking line becomes the same as a pressure of fluid of the fluid l...