US Patent Issued to Cymer on Nov. 18 for "Directed gas purge to reduce dusting of excimer discharge chamber windows" (California Inventor)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,432, issued on Nov. 18, was assigned to Cymer LLC (San Diego).

"Directed gas purge to reduce dusting of excimer discharge chamber windows" was invented by John Theodore Melchior (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A light source apparatus includes a chamber and a metal fluoride trap coupled to the chamber and configured to provide clean gas to a set of window housing apparatuses coupled to the chamber. Each window housing apparatus is configured to reduce metal fluoride dusting on an optical window and includes a window housing supporting an optical window, an aperture apparatus coupled to the window housing, and an insert disp...