ALEXANDRIA, Va., April 9 -- United States Patent no. 12,270,774, issued on April 8, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"System to inspect, modify or analyze a region of interest of a sample by charged particles, set of systems to inspect, modify or analyze a region of interest of a sample and method to inspect, modify or analyze a region of interest of a sample by charged particles" was invented by John A. Notte (Gloucester, Mass.), Mark D. DiManna (Fremont, N.H.), Jeffrey Sauer (Danvers, Mass.) and Terry Griffin (Salem, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system inspects, modifies or analyzes a region of interest of a sample via charged particles. A detector device...