US Patent Issued to Carl Zeiss Microscopy on April 22 for "Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device" (German Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,456, issued on April 22, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany).

"Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device" was invented by Andreas Schmaunz (Oberkochen, Germany), Gero Walter (Westhausen, Germany), Bernd Stenke (Illertissen, Germany) and Gerald Schmid (Blaustein, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas reservoir that receives a precursor has a gas-receiving unit which is arranged in a first receiving unit of a basic body and a sliding unit which is arranged movably in a second receiving unit of the basic body. The gas-receiving unit has a mova...