ALEXANDRIA, Va., July 30 -- United States Patent no. 12,371,811, issued on July 29, was assigned to Atotech Deutschland GmbH & Co. KG (Berlin).

"Apparatus for wet processing of a planar workpiece, device for a cell of the apparatus and method of operating the apparatus" was invented by Ferdinand Wiener (Berlin), Henry Kunze (Berlin) and Britta Scheller (Berlin).

According to the abstract* released by the U.S. Patent & Trademark Office: "A device for a cell of an apparatus for wet processing of a planar workpiece, comprises a structure comprising first and second walls. The workpiece is movable in a central plane through a space between the first and second walls in a first direction (y). Apertures for introducing pressurised liquid betwee...