US Patent Issued to ASML Netherlands on Sept. 23 for "Apparatus of plural charged-particle beams" (Chinese, American Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,408, issued on Sept. 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Apparatus of plural charged-particle beams" was invented by Shuai Li (Beijing), Weiming Ren (San Jose, Calif.), Xuedong Liu (San Jose, Calif.), Juying Dou (San Jose, Calif.), Xuerang Hu (San Jose, Calif.) and Zhongwei Chen (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the interva...