US Patent Issued to ASML NETHERLANDS on Feb. 10 for "Charged particle assessment tool, inspection method" (Dutch Inventor)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,548,735, issued on Feb. 10, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Charged particle assessment tool, inspection method" was invented by Marco Jan-Jaco Wieland (Delft, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle assessment tool includes: an objective lens configured to project a plurality of charged particle beams onto a sample, the objective lens having a sample-facing surface defining a plurality of beam apertures through which respective ones of the charged particle beams are emitted toward the sample; and a plurality of capture electrodes adjacent respective ones of the beam apertures and co...