US Patent Issued to Applied Materials on Feb. 3 for "Throttle valve and foreline cleaning using a microwave source" (American, Indian Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,539,530, issued on Feb. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Throttle valve and foreline cleaning using a microwave source" was invented by Khokan Chandra Paul (Cupertino, Calif.), Truong Van Nguyen (Milpitas, Calif.), Kelvin Chan (San Ramon, Calif.), Diwakar Kedlaya (San Jose, Calif.), Anantha K. Subramani (San Jose, Calif.), Abdul Aziz Khaja (San Jose, Calif.), Vijet Patil (Bangalore, India), Yusheng Fang (Santa Cruz, Calif.), Liangfa Hu (Newark, Calif.) and Prashant Kumar Kulshreshtha (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary semiconductor processing systems may include a processing chamber...