US Patent Issued to Applied Materials on Feb. 11 for "Apparatus and method of brush cleaning using periodic chemical treatments" (California Inventor)

ALEXANDRIA, Va., Feb. 12 -- United States Patent no. 12,224,186, issued on Feb. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and method of brush cleaning using periodic chemical treatments" was invented by Brian J. Brown (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A chemical mechanical polishing (CMP) system include apparatus and methods to clean brushes used to scrub substrates, including brush cleaning using periodic chemical treatment. One or more embodiments include a method of operating the CMP system to rotate a first one or more scrubber brushes while the first one or more scrubber brushes are in contact with a first substrate, performing, concurre...