INTERNATIONAL PATENT: ULVAC, INC., 株式会社アルバック FILES APPLICATION FOR "VACUUM TREATMENT DEVICE, ELECTROSTATIC CHUCK AND TRANSPORT ROLLER"

GENEVA, May 5 -- ULVAC, INC. (2500 Hagisono, Chigasaki-shi, Kanagawa2538543), 株式会社アルバック (神奈川県茅ヶ崎市萩園２５００番地) filed a patent application (PCT/JP2023/038761) for "VACUUM TREATMENT DEVICE, ELECTROSTATIC CHUCK, AND TRANSPORT ROLLER" on Oct 26, 2023. With publication no. WO/2025/088764, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KIKUCHI, Toru (c/o ULVA...