GENEVA, Sept. 9 -- TOMOEGAWA CORPORATION (2-1-3 Kyobashi, Chuo-ku, Tokyo1048335), 株式会社巴川コーポレーション (東京都中央区京橋二丁目１番３号) filed a patent application (PCT/JP2025/007099) for "PLASMA-RESISTANT STRUCTURE, PRODUCTION METHOD FOR PLASMA-RESISTANT STRUCTURE, ELECTROSTATIC CHUCK, EDGE RING, FIBER STRUCTURE, PLASMA PROCESSING DEVICE MEMBER, AND REPAIR METHOD FOR PLASMA PROCESSING DEVICE MEMBER" on Feb 28, 2025. With publication no. WO/2025/183157, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application w...