INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社 FILES APPLICATION FOR "TEMPERATURE-ADJUSTING METHOD FOR SUBSTRATE SUPPORT TABLE AND INSPECTION APPARATUS"

GENEVA, July 8 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/044407) for "TEMPERATURE-ADJUSTING METHOD FOR SUBSTRATE SUPPORT TABLE AND INSPECTION APPARATUS" on Dec 16, 2024. With publication no. WO/2025/142591, the details related to the patent application was published on Jul 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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