INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社 FILES APPLICATION FOR "SUBSTRATE PROCESSING DEVICE AND ELECTROSTATIC CHUCK"

GENEVA, July 8 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/044380) for "SUBSTRATE PROCESSING DEVICE AND ELECTROSTATIC CHUCK" on Dec 16, 2024. With publication no. WO/2025/142585, the details related to the patent application was published on Jul 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): OTSUKI, Kohei (c/o...