GENEVA, May 19 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/038211) for "FILM FORMATION METHOD AND FILM FORMATION DEVICE" on Oct 25, 2024. With publication no. WO/2025/100276, the details related to the patent application was published on May 15, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SAMESHIMA, Takashi (c/...