INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社 FILES APPLICATION FOR "ETCHING METHOD AND PLASMA TREATMENT DEVICE"

GENEVA, Feb. 17 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/026480) for "ETCHING METHOD AND PLASMA TREATMENT DEVICE" on Jul 24, 2024. With publication no. WO/2025/033183, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SUZUKI Shoi (c/o Tokyo Elec...