GENEVA, March 17 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/030058) for "ETCHING METHOD AND ETCHING DEVICE" on Aug 23, 2024. With publication no. WO/2025/052965, the details related to the patent application was published on Mar 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): TAKAHASHI Nobuhiro (c/o Tokyo Elec...