INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社, UNIVERSITY OF HYOGO, 兵庫県公立大学法人 FILES APPLICATION FOR "SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM"

GENEVA, July 8 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号), UNIVERSITY OF HYOGO (8-2-1, Gakuennishi-machi, Nishi-ku, Kobe-shi, Hyogo6512197), 兵庫県公立大学法人 (兵庫県神戸市西区学園西町８－２－１) filed a patent application (PCT/JP2024/044221) for "SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM" on Dec 13, 2024. With publication no. WO/20...