INTERNATIONAL PATENT: THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES, 中国科学院光电技术研究所 FILES APPLICATION FOR "THERMAL CORRECTION WAFER BEARING TABLE, PHOTOLITHOGRAPHY DEVICE AND HIGH-ORDER OVERLAY ERROR CORRECTION METHOD"

GENEVA, May 25 -- THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES (P. O. Box 350, ShuangliuChengdu, Sichuan 610209), 中国科学院光电技术研究所 (中国四川省成都市双流350信箱) filed a patent application (PCT/CN2023/139578) for "THERMAL CORRECTION WAFER BEARING TABLE, PHOTOLITHOGRAPHY DEVICE, AND HIGH-ORDER OVERLAY ERROR CORRECTION METHOD" on Dec 18, 2023. With publication no. WO/2025/102474, the details related to the patent application was published on May 22, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which ...