INTERNATIONAL PATENT: THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES, 中国科学院光电技术研究所 FILES APPLICATION FOR "OFF-AXIS ILLUMINATION GRATING AND PREPARATION METHOD THEREFOR AND SEPARABLE OFF-AXIS ILLUMINATION LITHOGRAPHY MASK"

GENEVA, June 1 -- THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES (P. O. Box 350, ShuangliuChengdu, Sichuan 610209), 中国科学院光电技术研究所 (中国四川省成都市双流350信箱) filed a patent application (PCT/CN2023/139575) for "OFF-AXIS ILLUMINATION GRATING AND PREPARATION METHOD THEREFOR, AND SEPARABLE OFF-AXIS ILLUMINATION LITHOGRAPHY MASK" on Dec 18, 2023. With publication no. WO/2025/107385, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, wh...