INTERNATIONAL PATENT: THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES, 中国科学院光电技术研究所 FILES APPLICATION FOR "DETECTION METHOD FOR SHIELDED MASK MARK AND CORRECTION METHOD FOR MASK POSITION"

GENEVA, May 10 -- THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES (P. O. Box 350, ShuangliuChengdu, Sichuan 610209), 中国科学院光电技术研究所 (中国四川省成都市双流350信箱) filed a patent application (PCT/CN2023/139546) for "DETECTION METHOD FOR SHIELDED MASK MARK AND CORRECTION METHOD FOR MASK POSITION" on Dec 18, 2023. With publication no. WO/2025/091654, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellec...