INTERNATIONAL PATENT: SHINWA CONTROLS CO., LTD, 伸和コントロールズ株式会社 FILES APPLICATION FOR "TEMPERATURE CONTROL DEVICE, PLASMA ETCHING DEVICE AND SEMICONDUCTOR MANUFACTURING SYSTEM"

GENEVA, Sept. 9 -- SHINWA CONTROLS CO., LTD (2-6-20 Kurigi, Asao-ku, Kawasaki-shi, Kanagawa2150033), 伸和コントロールズ株式会社 (神奈川県川崎市麻生区栗木二丁目６番２０号) filed a patent application (PCT/JP2025/002081) for "TEMPERATURE CONTROL DEVICE, PLASMA ETCHING DEVICE, AND SEMICONDUCTOR MANUFACTURING SYSTEM" on Jan 23, 2025. With publication no. WO/2025/182362, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, ...