GENEVA, Jan. 12 -- SHANGHAI MICSON INDUSTRIAL AUTOMATION CO., LTD. (Building 5, 333 Wanfang RoadMinhang District, Shanghai 201112), 上海微松工业自动化有限公司 (中国上海市闵行区万芳路333号5幢) filed a patent application (PCT/CN2025/103761) for "EFEM APPARATUS FOR WAFER HARDNESS TESTING" on Jun 26, 2025. With publication no. WO/2026/007791, the details related to the patent application was published on Jan 08, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIP...