INTERNATIONAL PATENT: SHANGHAI INSTITUTE OF IC MATERIALS, 上海集成电路材料研究院有限公司 FILES APPLICATION FOR "ELECTRON SOURCE MODULE AND ELECTRON-BEAM DIRECT WRITING MACHINE"

GENEVA, Oct. 4 -- SHANGHAI INSTITUTE OF IC MATERIALS (Room 301, 3rd Floor, Building 1, No. 1180, Xingxian Road,Jiading District, Shanghai 201800), 上海集成电路材料研究院有限公司 (中国上海市嘉定区兴贤路1180号1幢3层301室) filed a patent application (PCT/CN2025/085124) for "ELECTRON SOURCE MODULE AND ELECTRON-BEAM DIRECT WRITING MACHINE" on Mar 26, 2025. With publication no. WO/2025/201424, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) sys...