INTERNATIONAL PATENT: SHANGHAI INSTITUTE OF IC MATERIALS, 上海集成电路材料研究院有限公司 FILES APPLICATION FOR "ELECTRON BEAM DIRECT WRITING DEVICE"

GENEVA, June 9 -- SHANGHAI INSTITUTE OF IC MATERIALS (10F, Building 1, 333 Huangqing RoadJiading District, Shanghai 201899), 上海集成电路材料研究院有限公司 (中国上海市嘉定区皇庆路333号1号楼10F) filed a patent application (PCT/CN2024/131431) for "ELECTRON BEAM DIRECT WRITING DEVICE" on Nov 11, 2024. With publication no. WO/2025/113161, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Org...