INTERNATIONAL PATENT: PSK INC., 피에스케이 주식회사, RTM INC., (주)알티엠 FILES APPLICATION FOR "ABNORMALITY DETECTION METHOD OF GAS CURTAIN SYSTEM, PROGRAM STORED IN RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS"

GENEVA, Aug. 19 -- PSK INC. (48, Samsung 1-ro 4-gilHwaseong-siGyeonggi-do 18449), 피에스케이 주식회사 (경기도화성시삼성1로4길 48), RTM INC. (11 Yeoksam-ro 3-gilGangnam-guSeoul 06242), (주)알티엠 (서울특별시강남구역삼로3길 11) filed a patent application (PCT/KR2025/099226) for "ABNORMALITY DETECTION METHOD OF GAS CURTAIN SYSTEM, PROGRAM STORED IN RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS" on Feb 04, 2025. With publication no. WO/2025/170417, the details related to the patent application was published on Aug 14, 2025.

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