GENEVA, April 6 -- NIKON CORPORATION (1-5-20, Nishioi, Shinagawa-ku, Tokyo1408601), 株式会社ニコン (東京都品川区西大井１－５－２０) filed a patent application (PCT/JP2023/035129) for "EXPOSURE APPARATUS AND SUBSTRATE SUPPORT MEMBER" on Sep 27, 2023. With publication no. WO/2025/069248, the details related to the patent application was published on Apr 03, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HARA, Atsushi (c/o Miyagi Nikon Precision Co., Ltd., 20, Aza...