INTERNATIONAL PATENT: NHK SPRING CO., LTD., 日本発條株式会社, SHIBAURA INSTITUTE OF TECHNOLOGY, 学校法人芝浦工業大学 FILES APPLICATION FOR "COMPONENT OF SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING COMPONENT OF SEMICONDUCTOR MANUFACTURING APPARATUS"

Posted On: 2025-08-18

GENEVA, Aug. 18 -- NHK SPRING CO., LTD. (3-10, Fukuura, Kanazawa-ku, Yokohama-shi, Kanagawa2360004), 日本発條株式会社 (神奈川県横浜市金沢区福浦三丁目１０番地), SHIBAURA INSTITUTE OF TECHNOLOGY (7-5, Toyosu 3-chome, Koto-ku, Tokyo1358548), 学校法人芝浦工業大学 (東京都江東区豊洲三丁目７番５号) filed a patent application (PCT/JP2025/001698) for "COMPONENT OF SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING COMPONENT OF ...

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INTERNATIONAL PATENT: NHK SPRING CO., LTD., 日本発條株式会社, SHIBAURA INSTITUTE OF TECHNOLOGY, 学校法人芝浦工業大学 FILES APPLICATION FOR "COMPONENT OF SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING COMPONENT OF SEMICONDUCTOR MANUFACTURING APPARATUS"