INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "RECONFIGURABLE ADVANCED MODULAR PRECURSOR DELIVERY SYSTEM (AMPDS)"

GENEVA, April 8 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538-6470) filed a patent application (PCT/US2024/048029) for "RECONFIGURABLE ADVANCED MODULAR PRECURSOR DELIVERY SYSTEM (AMPDS)" on Sep 23, 2024. With publication no. WO/2025/072099, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SANKHE, Pratik (c/o Lam Research Corporation4650 Cushing ParkwayFremont, California 94538-6470), DRAPER, Emile Charles (c/o Lam Research Corporation4650 Cushing ParkwayFremont, California 94538-6470), CHEN, Ph...