INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "RECLAMATION OF HYDROGEN HALIDES IN DRY DEVELOPMENT OF PHOTORESISTS"

GENEVA, April 1 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/046887) for "RECLAMATION OF HYDROGEN HALIDES IN DRY DEVELOPMENT OF PHOTORESISTS" on Sep 16, 2024. With publication no. WO/2025/064348, the details related to the patent application was published on Mar 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WEIDMAN, Timothy William (4650 Cushing Pkwy.Fremont, California 94538), KENANE, Nizan (4650 Cushing Pkwy.Fremont, California 94538), COYLE, Jason Philip (4650 Cushing Pkwy.Fremont, California 94538), VRTIS, Raymond ...