INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF SILICON OXIDE"

GENEVA, Dec. 3 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/029792) for "LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF SILICON OXIDE" on May 16, 2024. With publication no. WO/2024/243002, the details related to the patent application was published on Nov 28, 2024.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AGNEW, Douglas (4650 Cushing Pkwy.Fremont, California 94538), CHURCH, Jonathan (4650 Cushing Pkwy.Fremont, California 94538), PETRAGLIA, Jennifer Leigh (4650 Cushing Pkwy.Fremont, California 94538), SUBRAMONIUM, Pramod (4650 Cu...