INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "IN-SITU IN-BAND AND OUT-OF-BAND SPECTRAL MEASUREMENT FOR EUV TOOLS"

GENEVA, June 4 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2023/083463) for "IN-SITU IN-BAND AND OUT-OF-BAND SPECTRAL MEASUREMENT FOR EUV TOOLS" on Dec 11, 2023. With publication no. WO/2025/111006, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RAJENDRAN, Rajeev (1176 Dolores StreetSan Francisco, California 94110), XIE, Michael (Room 909, No.218 HaiQu RoadPudong, Shanghai 200120), FARID, Atry (1924 Queen Mary Ct.San Jose, California 95132), MELSHEIMER, Florian (O...