INTERNATIONAL PATENT: JIANGSU SHENZHOU SEMICONDUCTOR TECHNOLOGY CO., LTD, 江苏神州半导体科技有限公司 FILES APPLICATION FOR "TEMPERATURE CONTROL CIRCUIT AND CONTROL METHOD FOR REACTION CHAMBER OF REMOTE PLASMA SOURCE"

GENEVA, Jan. 25 -- JIANGSU SHENZHOU SEMICONDUCTOR TECHNOLOGY CO., LTD (No.19 West Shugang Road, Hanjiang DistrictYangzhou, Jiangsu 225000), 江苏神州半导体科技有限公司 (中国江苏省扬州市邗江区蜀岗西路19号) filed a patent application (PCT/CN2025/084632) for "TEMPERATURE CONTROL CIRCUIT AND CONTROL METHOD FOR REACTION CHAMBER OF REMOTE PLASMA SOURCE" on Mar 25, 2025. With publication no. WO/2026/016528, the details related to the patent application was published on Jan 22, 2026.

Notably, the patent application was submitted under the International Patent Classification (IP...